How To Remove Set Screw From Faucet Handle

I've got a leaking shower faucet, Delta.
Set screw's stuck, stripped out the 7/64" key in my old Craftsman set.

Short of cutting it off with a bandsaw, what's the best way to get it off? I don't mind replacing the handle with the stem assembly (but would prefer putting new o-rings into the originals).

Thanks!
left-handed drillbit, very slow speed.
bpro Big Ugly Fat F*****

I have had good luck using CLR as a penetrating oil substitute. We have very hard water where I live and the mineral deposits can jam up the works on jest about anything.
JTW Well-Known Member

I always end up using a very special tool called a BFH. It's perfect for these type of jobs requiring a delicate touch.
This. :up:
Make sure the water is turned off, though.
Whatever dude. Leaving the water on is when the fun starts.
knock-er-loose penetrating oil for an hour or so, then a left hand drill bit, then an easy-out if that fails.
Better than any penetrating oil ever sold: Mix acetone and Automatic Transmission fluid 50-50 in a spray bottle. Rubber-band a plastic bag around the faucet handle and spray with the penetrant mix. Wait 4 hours.
Find a TORX bit the right size to bang into the deformed hex opening.

Heat the screw and surrounding area with a heat gun. Gentle.

Unscrew the set screw very gently. Just apply torque and keep increasing very slowly.

I've taken out a LOT of rusted/frozen screws this way. I just wish people would bring them to me BEFORE they beat them, drill them, break off an EZ Out in them, etc.
Always thought they were metric sizes.
Shouldn't this be in the Tech section??
Notch with metal cutoff wheel until you can remove it
Venom51 John Deere Equipment Expert - Not really

Same as removing anything else that's stuck...small explosives.
Razr Well-Known Member
Finally got to it again today, after using Liquid Wrench - my wife had some better use for the gallon can of Acetone that I keep in the garage (along with about 20 cans of stripper, thinner, reducer, hardener, yadda) than I do, so I couldn't try the ATF and Acetone mix.
I got the screw out using a LH drill bit (Harbor Freight), then it took an hour to get the handle over the setscrew deformation mark. THEN I got to fix the leaky faucet.

Thanks for all the suggestions!